In Situ Infrared Characterization during Atomic Layer Deposition of Lanthanum Oxide

标题
In Situ Infrared Characterization during Atomic Layer Deposition of Lanthanum Oxide
作者
关键词
-
出版物
Journal of Physical Chemistry C
Volume 113, Issue 2, Pages 654-660
出版商
American Chemical Society (ACS)
发表日期
2009-02-04
DOI
10.1021/jp806027m

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