Novel Noria (Water Wheel-Like Cyclic Oligomer) Derivative as a Chemically Amplified Extreme Ultraviolet (EUV)-Resist Material

标题
Novel Noria (Water Wheel-Like Cyclic Oligomer) Derivative as a Chemically Amplified Extreme Ultraviolet (EUV)-Resist Material
作者
关键词
-
出版物
JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY
Volume 22, Issue 1, Pages 73-76
出版商
Technical Association of Photopolymers, Japan
发表日期
2009-07-22
DOI
10.2494/photopolymer.22.73

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