High Resolution Positive-Working Molecular Resist Derived from Truxene

标题
High Resolution Positive-Working Molecular Resist Derived from Truxene
作者
关键词
-
出版物
JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY
Volume 22, Issue 5, Pages 609-614
出版商
Technical Association of Photopolymers, Japan
发表日期
2009-09-18
DOI
10.2494/photopolymer.22.609

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