Structure and electrical properties of nitrided NbN–TiN sol–gel derived films

标题
Structure and electrical properties of nitrided NbN–TiN sol–gel derived films
作者
关键词
-
出版物
JOURNAL OF NON-CRYSTALLINE SOLIDS
Volume 355, Issue 24-27, Pages 1342-1346
出版商
Elsevier BV
发表日期
2009-06-11
DOI
10.1016/j.jnoncrysol.2009.05.023

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