Thermoelastic damping in thin microrings with two-dimensional heat conduction

标题
Thermoelastic damping in thin microrings with two-dimensional heat conduction
作者
关键词
MEMS, Microring, Thermoelastic damping, Quality factor
出版物
出版商
Elsevier BV
发表日期
2015-01-28
DOI
10.1016/j.physe.2015.01.039

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