Patterning of Polymer Nanocomposite Resists Containing Metal Nanoparticles by Electron Beam Lithography

标题
Patterning of Polymer Nanocomposite Resists Containing Metal Nanoparticles by Electron Beam Lithography
作者
关键词
-
出版物
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY
Volume 11, Issue 8, Pages 7390-7393
出版商
American Scientific Publishers
发表日期
2011-09-20
DOI
10.1166/jnn.2011.4803

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