Fabrication Process of Carbon Nanotube Field Effect Transistors Using Atomic Layer Deposition Passivation for Biosensors

标题
Fabrication Process of Carbon Nanotube Field Effect Transistors Using Atomic Layer Deposition Passivation for Biosensors
作者
关键词
-
出版物
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY
Volume 10, Issue 6, Pages 3805-3809
出版商
American Scientific Publishers
发表日期
2010-04-15
DOI
10.1166/jnn.2010.1983

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