Growth and Characterization of Titanium Silicate Nanofilms for Gate Oxide Applications

标题
Growth and Characterization of Titanium Silicate Nanofilms for Gate Oxide Applications
作者
关键词
-
出版物
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY
Volume 8, Issue 2, Pages 577-583
出版商
American Scientific Publishers
发表日期
2008-03-14
DOI
10.1166/jnn.2008.a206

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