Titanium Dioxide Thin Films Deposited by Plasma Enhanced Atomic Layer Deposition for OLED Passivation

标题
Titanium Dioxide Thin Films Deposited by Plasma Enhanced Atomic Layer Deposition for OLED Passivation
作者
关键词
-
出版物
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY
Volume 8, Issue 9, Pages 4726-4729
出版商
American Scientific Publishers
发表日期
2008-08-06
DOI
10.1166/jnn.2008.ic48

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