Removal of 10-nm contaminant particles from Si wafers using argon bullet particles

标题
Removal of 10-nm contaminant particles from Si wafers using argon bullet particles
作者
关键词
-
出版物
JOURNAL OF NANOPARTICLE RESEARCH
Volume 13, Issue 10, Pages 4979-4986
出版商
Springer Nature
发表日期
2011-07-09
DOI
10.1007/s11051-011-0479-8

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