Infrared and near-infrared spectroscopic probing of atomic layer deposition processes

标题
Infrared and near-infrared spectroscopic probing of atomic layer deposition processes
作者
关键词
-
出版物
JOURNAL OF MOLECULAR STRUCTURE
Volume 976, Issue 1-3, Pages 324-327
出版商
Elsevier BV
发表日期
2010-04-12
DOI
10.1016/j.molstruc.2010.03.087

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