Non-destructive and quantitative imaging of a nano-structured microchip by ptychographic hard X-ray scanning microscopy

标题
Non-destructive and quantitative imaging of a nano-structured microchip by ptychographic hard X-ray scanning microscopy
作者
关键词
-
出版物
JOURNAL OF MICROSCOPY
Volume 241, Issue 1, Pages 9-12
出版商
Wiley
发表日期
2010-09-27
DOI
10.1111/j.1365-2818.2010.03453.x

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