期刊
JOURNAL OF MICROSCOPY
卷 232, 期 3, 页码 395-405出版社
WILEY-BLACKWELL
DOI: 10.1111/j.1365-2818.2008.02134.x
关键词
FIB; HRTEM; intergranular films; sapphire; specimen preparation
类别
资金
- Israel Science Foundation [163/05]
- Russell Berrie Nanotechnology Institute at the Technion
The preparation of good transmission electron microscopy specimens with minimum milling damage can be very complicated, especially from a specific area in a sample. Therefore, a novel approach for transmission electron microscopy specimen preparation using a focused ion beam system is proposed, based on the use of low energy (5 kV)Ga ions and a low incident ion angle (similar to 1 degrees) from a thickness of similar to 500 nm until the sample is electron transparent. Transmission electron microscopy specimens prepared by this method have significantly less irradiation damage, demonstrated by successful quantitative high-resolution transmission electron microscopy conducted on sapphire from data acquired using an aberration-corrected field emission gun transmission electron microscopy. Quantitative analysis was conducted by iterative digital image matching. The accuracy and sensitivity of the matching process is discussed.
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