An electret-based energy harvesting device with a wafer-level fabrication process

标题
An electret-based energy harvesting device with a wafer-level fabrication process
作者
关键词
-
出版物
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 23, Issue 11, Pages 114010
出版商
IOP Publishing
发表日期
2013-10-25
DOI
10.1088/0960-1317/23/11/114010

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