Study on diffraction effect and microstructure profile fabricated by one-step backside lithography

标题
Study on diffraction effect and microstructure profile fabricated by one-step backside lithography
作者
关键词
-
出版物
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 23, Issue 3, Pages 035004
出版商
IOP Publishing
发表日期
2013-01-25
DOI
10.1088/0960-1317/23/3/035004

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