Development of an SU-8 MEMS process with two metal electrodes using amorphous silicon as a sacrificial material

标题
Development of an SU-8 MEMS process with two metal electrodes using amorphous silicon as a sacrificial material
作者
关键词
-
出版物
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 23, Issue 3, Pages 035037
出版商
IOP Publishing
发表日期
2013-02-08
DOI
10.1088/0960-1317/23/3/035037

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