Stop grating for perfect replication of micro Fresnel lens by thermal imprinting

A stop grating concept is proposed to improve polymer filling in the thermal imprinting of a micro Fresnel lens structure. The stop grating consists of line and space structures outside the Fresnel lens pattern zone area. The experimental results have proved that the stop grating can help to achieve the complete filling of a mold, at the same time acting as a stop to prevent possible damage to the mold surface relief structures during imprinting press. A computer simulation was carried out to identify the phenomena of micro-holes at the edge of imprinted pattern. By removing the cavity between the pattern area and stop grating, perfect imprinting results have been achieved.