Electrostatic actuator with liquid metal–elastomer compliant electrodes used for on-chip microvalving

标题
Electrostatic actuator with liquid metal–elastomer compliant electrodes used for on-chip microvalving
作者
关键词
-
出版物
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 22, Issue 9, Pages 097001
出版商
IOP Publishing
发表日期
2012-07-26
DOI
10.1088/0960-1317/22/9/097001

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