Optimization of NEMS pressure sensors with a multilayered diaphragm using silicon nanowires as piezoresistive sensing elements

标题
Optimization of NEMS pressure sensors with a multilayered diaphragm using silicon nanowires as piezoresistive sensing elements
作者
关键词
-
出版物
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 22, Issue 5, Pages 055012
出版商
IOP Publishing
发表日期
2012-04-17
DOI
10.1088/0960-1317/22/5/055012

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