Rapid fabrication and characterization of MEMS Parylene C bellows for large deflection applications

标题
Rapid fabrication and characterization of MEMS Parylene C bellows for large deflection applications
作者
关键词
-
出版物
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 22, Issue 11, Pages 115031
出版商
IOP Publishing
发表日期
2012-10-11
DOI
10.1088/0960-1317/22/11/115031

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