Development of individually-addressable parylene microtube arrays

标题
Development of individually-addressable parylene microtube arrays
作者
关键词
-
出版物
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 21, Issue 11, Pages 115005
出版商
IOP Publishing
发表日期
2011-10-05
DOI
10.1088/0960-1317/21/11/115005

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