A shadow-mask evaporated pyroMEMS igniter

标题
A shadow-mask evaporated pyroMEMS igniter
作者
关键词
-
出版物
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 21, Issue 10, Pages 104013
出版商
IOP Publishing
发表日期
2011-09-29
DOI
10.1088/0960-1317/21/10/104013

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