Fabrication technique of a compressible biocompatible interconnect using a thin film transfer process

Novel glass microprobe arrays for neural recording

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Dry etching of polydimethylsiloxane using microwave plasma

(2009) Sung Jin Hwang et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Micro-pressure sensor made of conductive PDMS for microfluidic applications

(2009) H. Li et al.   MICROELECTRONIC ENGINEERING

Grinding of silicon wafers: A review from historical perspectives

(2008) Z.J. Pei et al.   INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE

An interconnect for out-of-plane assembled biomedical probe arrays

(2008) A A A Aarts et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

A Photopatternable Silicone for Biological Applications

(2007) Salil P. Desai et al.   LANGMUIR