期刊
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
卷 21, 期 2, 页码 -出版社
IOP PUBLISHING LTD
DOI: 10.1088/0960-1317/21/2/027003
关键词
-
类别
资金
- German Research Foundation (DFG) within the collaborative research center [SFB 613]
We report on an efficient high throughput method for the photolithographic fabrication of well-defined arbitrarily shaped SU-8 microparticles without a sacrificial release layer. The procedure eliminates the spincoating of a sacrificial layer otherwise needed for particle lift-off, thereby reducing processing time and costs. Statistical analysis of the size distribution revealed a standard deviation of less than 2.3% in size. The particles can be immediately released into aqueous solution. This allows for anisotropical functionalization of the particles with, for example, biological loads or elements of molecular recognition after the development of the SU-8 structures.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据