期刊
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
卷 21, 期 9, 页码 -出版社
IOP PUBLISHING LTD
DOI: 10.1088/0960-1317/21/9/095021
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This paper describes a new collective microfabrication process of all-organic microcantilever chips. This method is based on the hierarchical combination of shadow-masking and wafer-bonding processes. The shadow-masking combines deposition and patterning in one step thanks to spray-coating through a polymer microstencil that allows patterning of thermosensitive materials such as PMMA. The shadow-masking parameters have been optimized to obtain suspended microcantilevers characterized by a convenient thickness profile. The resulting PMMA structures were then transferred onto SU-8 chips by using an SU-8 wafer-bonding process. The effect of the UV exposure dose of both SU-8 layers in contact on the bonding quality has been investigated and optimized. With the optimized bonding process, we have achieved the large-scale transfer of microstructures with a yield of 100% and a bond strength of 50 MPa. These microcantilevers were also tested at resonance to determine Young's moduli of patterned polymers. The low values obtained ( below 5 GPa) make these organic MEMS structures strong candidates for highly sensitive sensing applications when used in the static mode.
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