Fabrication and characterization of reactive nanoscale multilayer systems for low-temperature bonding in microsystem technology

标题
Fabrication and characterization of reactive nanoscale multilayer systems for low-temperature bonding in microsystem technology
作者
关键词
-
出版物
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 20, Issue 6, Pages 064018
出版商
IOP Publishing
发表日期
2010-06-02
DOI
10.1088/0960-1317/20/6/064018

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