Fabrication of microstructured silicon (µs-Si) from a bulk Si wafer and its use in the printing of high-performance thin-film transistors on plastic substrates

标题
Fabrication of microstructured silicon (µs-Si) from a bulk Si wafer and its use in the printing of high-performance thin-film transistors on plastic substrates
作者
关键词
-
出版物
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 20, Issue 7, Pages 075018
出版商
IOP Publishing
发表日期
2010-06-08
DOI
10.1088/0960-1317/20/7/075018

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