Piezoelectric MEMS generators fabricated with an aerosol deposition PZT thin film

标题
Piezoelectric MEMS generators fabricated with an aerosol deposition PZT thin film
作者
关键词
-
出版物
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 19, Issue 6, Pages 065014
出版商
IOP Publishing
发表日期
2009-05-21
DOI
10.1088/0960-1317/19/6/065014

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