Characterization of deep wet etching of fused silica glass for single cell and optical sensor deposition

标题
Characterization of deep wet etching of fused silica glass for single cell and optical sensor deposition
作者
关键词
-
出版物
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 19, Issue 6, Pages 065013
出版商
IOP Publishing
发表日期
2009-05-21
DOI
10.1088/0960-1317/19/6/065013

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