Characterization of deep wet etching of fused silica glass for single cell and optical sensor deposition

出版年份 2009 全文链接

标题

作者

关键词

出版物

Volume 19, Issue 6, Pages 065013

出版商

IOP Publishing

发表日期

2009-05-21

DOI

10.1088/0960-1317/19/6/065013

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