Design, fabrication and characterization of a conducting PDMS for microheaters and temperature sensors

标题
Design, fabrication and characterization of a conducting PDMS for microheaters and temperature sensors
作者
关键词
-
出版物
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 19, Issue 4, Pages 045010
出版商
IOP Publishing
发表日期
2009-03-19
DOI
10.1088/0960-1317/19/4/045010

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