Dual-side and three-dimensional microelectrode arrays fabricated from ultra-thin silicon substrates

标题
Dual-side and three-dimensional microelectrode arrays fabricated from ultra-thin silicon substrates
作者
关键词
-
出版物
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 19, Issue 7, Pages 075008
出版商
IOP Publishing
发表日期
2009-06-24
DOI
10.1088/0960-1317/19/7/075008

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