期刊
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
卷 19, 期 2, 页码 -出版社
IOP PUBLISHING LTD
DOI: 10.1088/0960-1317/19/2/025022
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资金
- National Science Foundation [BES-0529217]
- University of Cincinnati Institute of Nanoscale Science and Technology
In this paper, a new cobalt-coated needle-type microelectrode array sensor for in situ measurements of phosphate has successfully been designed, fabricated and characterized. MEMS technologies were used to fabricate microelectrode arrays with a small tip size. An HF-based etching technique was used to taper and sharpen three-dimensional glass probes. A cobalt thin film was electroplated on a gold conductive layer using a cobalt sulfate electrolyte and then was oxidized to form CoO on the surface. The microelectrode array (MEA) was packaged on a designed printed circuit board (PCB) for electrical connections. The MEA sensors were fully characterized with potassium sulfate solution in the concentration range of 1 x 10(-5.1)-1 x 10(-3) M at pH 7.5. The repeatable phosphate-selective potentials with a sensitivity of similar to 96 mV per decade were exhibited with less than 30 s response times and good signal stability. This sensitivity is the highest value among the reported cobalt-based phosphate sensors to date. Ultimately, in the long term, we envision extension of this MEA sensor to include additional sensors for multi-analyte, rapid, accurate and reliable in situ sensing in biological applications.
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