Solving the shrinkage-induced PDMS alignment registration issue in multilayer soft lithography

出版年份 2009 全文链接

标题

Solving the shrinkage-induced PDMS alignment registration issue in multilayer soft lithography

作者

关键词

-

出版物

JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Volume 19, Issue 6, Pages 065015

出版商

IOP Publishing

发表日期

2009-05-21

DOI

10.1088/0960-1317/19/6/065015

参考文献

查看 5 条相关文献

向作者/读者发起求助以获取更多资源

Protocol

Reagent

Reprint

Discover Peeref hubs

Discuss science. Find collaborators. Network.

Join a conversation

Find the ideal target journal for your manuscript

Explore over 38,000 international journals covering a vast array of academic fields.

Search

© Peeref 2019-2024. All rights reserved.