Properties of SiO2electret films charged by ion implantation for MEMS-based energy harvesting systems

标题
Properties of SiO2electret films charged by ion implantation for MEMS-based energy harvesting systems
作者
关键词
-
出版物
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 19, Issue 9, Pages 094003
出版商
IOP Publishing
发表日期
2009-08-27
DOI
10.1088/0960-1317/19/9/094003

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