A simple and effective fabrication method for various 3D microstructures: backside 3D diffuser lithography

标题
A simple and effective fabrication method for various 3D microstructures: backside 3D diffuser lithography
作者
关键词
-
出版物
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 18, Issue 12, Pages 125015
出版商
IOP Publishing
发表日期
2008-11-07
DOI
10.1088/0960-1317/18/12/125015

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