The effect of the built-in stress level of AlN layers on the properties of piezoelectric vibration energy harvesters

标题
The effect of the built-in stress level of AlN layers on the properties of piezoelectric vibration energy harvesters
作者
关键词
-
出版物
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 18, Issue 10, Pages 104012
出版商
IOP Publishing
发表日期
2008-09-30
DOI
10.1088/0960-1317/18/10/104012

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