Large-area, high-aspect-ratio SU-8 molds for the fabrication of PDMS microfluidic devices

标题
Large-area, high-aspect-ratio SU-8 molds for the fabrication of PDMS microfluidic devices
作者
关键词
-
出版物
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 18, Issue 4, Pages 045021
出版商
IOP Publishing
发表日期
2008-03-12
DOI
10.1088/0960-1317/18/4/045021

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