A novel capacitive accelerometer with an eight-beam-mass structure by self-stop anisotropic etching of (1 0 0) silicon

出版年份 2008 全文链接

标题

作者

关键词

出版物

Volume 18, Issue 7, Pages 075005

出版商

IOP Publishing

发表日期

2008-05-22

DOI

10.1088/0960-1317/18/7/075005

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