Wafer-level flame-spray-pyrolysis deposition of gas-sensitive layers on microsensors

标题
Wafer-level flame-spray-pyrolysis deposition of gas-sensitive layers on microsensors
作者
关键词
-
出版物
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 18, Issue 3, Pages 035040
出版商
IOP Publishing
发表日期
2008-02-21
DOI
10.1088/0960-1317/18/3/035040

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