A membrane-based serpentine-shape pneumatic micropump with pumping performance modulated by fluidic resistance

标题
A membrane-based serpentine-shape pneumatic micropump with pumping performance modulated by fluidic resistance
作者
关键词
-
出版物
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 18, Issue 4, Pages 045008
出版商
IOP Publishing
发表日期
2008-03-01
DOI
10.1088/0960-1317/18/4/045008

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