Annularly Grooved Diaphragm Pressure Sensor With Embedded Silicon Nanowires for Low Pressure Application

标题
Annularly Grooved Diaphragm Pressure Sensor With Embedded Silicon Nanowires for Low Pressure Application
作者
关键词
-
出版物
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 23, Issue 6, Pages 1396-1407
出版商
Institute of Electrical and Electronics Engineers (IEEE)
发表日期
2014-04-12
DOI
10.1109/jmems.2014.2313635

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