3D Integration Using Self-Assembly at Air-Water-Solid Interface

标题
3D Integration Using Self-Assembly at Air-Water-Solid Interface
作者
关键词
-
出版物
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 23, Issue 3, Pages 579-584
出版商
Institute of Electrical and Electronics Engineers (IEEE)
发表日期
2014-02-01
DOI
10.1109/jmems.2013.2291235

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