Performance of Electro-Thermally Driven ${\rm VO}_{2}$-Based MEMS Actuators

标题
Performance of Electro-Thermally Driven ${\rm VO}_{2}$-Based MEMS Actuators
作者
关键词
-
出版物
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 23, Issue 1, Pages 243-251
出版商
Institute of Electrical and Electronics Engineers (IEEE)
发表日期
2013-07-17
DOI
10.1109/jmems.2013.2271774

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