期刊
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
卷 22, 期 3, 页码 739-746出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JMEMS.2013.2243109
关键词
Black silicon; fluoropolymer; hybrid template; self-alignment; self-assembly; solid edge; wetting contrast
类别
资金
- Academy of Finland Programmable and Spatially Multi-scale Self-assembly of Microcomponents (MUSA) [134206]
- Tekniikan Edistamissaatio under a personal grant for technology promotion
In this paper, we demonstrate self-alignment of microchips on a simple-to-fabricate hybrid template with both water and UV-curing adhesive (EPO-TEK UVO-114). The hybrid template contains receptor sites with solid edges for droplet confinement and large wetting contrast between the receptor sites and the substrate for microchip manipulation. Nanostructured black silicon surface functionalized with fluoropolymer is used as a substrate, while protruded silicon dioxide patterns covered with fluoropolymer serve as receptor sites. A simple and fast process consisting only of one pass of photolithography, cryogenic deep reactive-ion etching (RIE), and RIE steps is used to fabricate the hybrid template. The self-assembly tests are carried out in a hybrid microassembly setup. Dummy microchips of sizes 200 mu m x 200 mu m x 50 mu m are self-aligned on 200 mu m x 200 (m) receptor sites in ambient air with both water and adhesive. [2012-0178]
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