Modeling and Analysis of a Phase Change Material Thermohydraulic Membrane Microactuator

标题
Modeling and Analysis of a Phase Change Material Thermohydraulic Membrane Microactuator
作者
关键词
-
出版物
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 22, Issue 1, Pages 186-194
出版商
Institute of Electrical and Electronics Engineers (IEEE)
发表日期
2012-10-25
DOI
10.1109/jmems.2012.2222866

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