High-Frequency AlN-on-Silicon Resonant Square Gyroscopes

标题

作者

关键词

出版物

Volume 22, Issue 5, Pages 1007-1009

出版商

Institute of Electrical and Electronics Engineers (IEEE)

发表日期

2013-07-24

DOI

10.1109/jmems.2013.2273031

Interested in hosting your own webinar? Check the schedule and propose your idea to the Peeref Content Team.

Create Now

Quickly pose questions to the entire community. Debate answers and get clarity on the most important issues facing researchers.

Get Started