Design, Fabrication, and Characterization of a High-Heating-Efficiency 3-D Microheater for Catalytic Gas Sensors

出版年份 2012 全文链接

标题

作者

关键词

出版物

Volume 21, Issue 6, Pages 1402-1409

出版商

Institute of Electrical and Electronics Engineers (IEEE)

发表日期

2012-08-02

DOI

10.1109/jmems.2012.2208219

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