Fabrication of Very-High-Aspect-Ratio Micro Metal Posts and Gratings by Photoelectrochemical Etching and Electroplating

标题
Fabrication of Very-High-Aspect-Ratio Micro Metal Posts and Gratings by Photoelectrochemical Etching and Electroplating
作者
关键词
-
出版物
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 20, Issue 4, Pages 876-884
出版商
Institute of Electrical and Electronics Engineers (IEEE)
发表日期
2011-05-27
DOI
10.1109/jmems.2011.2148163

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