4.5 Article

Thermally Tunable Polymer Microlenses for Biological Imaging

期刊

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
卷 19, 期 6, 页码 1444-1449

出版社

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JMEMS.2010.2082499

关键词

Biological imaging; indium tin oxide (ITO); microlens; thermal expansion; tunable optics

资金

  1. National Science Foundation [DBI-0650020, CBET-0854030]
  2. China Scholarship Council
  3. Directorate For Engineering
  4. Div Of Chem, Bioeng, Env, & Transp Sys [0854030] Funding Source: National Science Foundation

向作者/读者索取更多资源

We present polydimethylsiloxane (PDMS) microlenses capable of thermally tuning their focal lengths via optically transparent indium tin oxide (ITO) microheaters. Microlenses with various diameters are created by molding PDMS over microstructures of reflowed photoresist. Due to a relatively large thermal expansion coefficient, these PDMS microlenses exhibit measurable thermal expansion with relatively small temperature changes. By adjusting the temperature of the microlenses using ITO microheaters, we can actively control their radii of curvature and focal lengths without requiring moving mechanical components. To demonstrate the tunability of the microlenses, we characterize temperature-dependent changes by focal length and magnification factor measurements. We also investigate the ability to use the microlenses for tunable observation of cells, demonstrating their potential application to biological imaging.

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