A MEMS Reactor for Atomic-Scale Microscopy of Nanomaterials Under Industrially Relevant Conditions

标题
A MEMS Reactor for Atomic-Scale Microscopy of Nanomaterials Under Industrially Relevant Conditions
作者
关键词
-
出版物
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 19, Issue 2, Pages 254-264
出版商
Institute of Electrical and Electronics Engineers (IEEE)
发表日期
2010-03-12
DOI
10.1109/jmems.2010.2041190

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